Activation Annealing Furnace "VF-3000H"
Usable from R&D to mass production! Vertical furnace with automatic transport compatible with 3 to 6-inch wafers.
The "VF-3000H" is an activation annealing furnace capable of ultra-high temperature processing, suitable for power device manufacturing. It can process mini-batches of 50 wafers and accommodates a wide range of wafer sizes from 3 inches to 6 inches. We have carefully selected the hardware and control systems, making it suitable for both R&D applications and mass production lines. Additionally, we also offer the "VF-5100," which can remove carbon after activation. 【Features】 - Mini-batch processing of 50 wafers, suitable for R&D and mass production lines - Accommodates a wide range of wafer sizes from 3 to 6 inches - The furnace features our unique metal-free structure - Temperature monitoring near the wafer is possible - Standard equipped with N2 load lock *For more details, please refer to the PDF document or feel free to contact us.
- Company：ジェイテクトサーモシステム
- Price：Other
